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Diffusion-isolated pressure equilibration for multigas refractometry
Department of Physics, Umeå University, Umeå, 901 87, Sweden.
RISE Research Institutes of Sweden, Safety and Transport, Measurement Technology. Department of Physics, Umeå University, Umeå, 901 87, Sweden.ORCID iD: 0000-0002-3261-9903
Department of Physics, Umeå University, Umeå, 901 87, Sweden.
RISE Research Institutes of Sweden, Safety and Transport, Measurement Technology.ORCID iD: 0000-0001-9068-6031
2026 (English)In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 44, no 3Article in journal (Refereed) Published
Abstract [en]

Fabry–Pérot refractometry is a leading technique for high-accuracy pressure realization; however, multigas operation is typically constrained by gas-handling complexity and the risk of cross-contamination. In this work, we investigate whether the pronounced difference in time scales between rapid pressure equilibration and the much slower molecular diffusion in long, narrow connections can be exploited to enable two connected Fabry–Pérot cavity-based refractometers to operate with different gases at the same pressure. Diffusion modeling based on Fick’s second law, together with experiments using two refractometers, shows that gas mixing can remain below 1 ppm for a variety of measurement times and pressures. These results demonstrate a simple and robust approach to simultaneous multigas refractometry at a common pressure without the need for physical separation hardware

Place, publisher, year, edition, pages
American Vacuum Society , 2026. Vol. 44, no 3
National Category
Atom and Molecular Physics and Optics
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URN: urn:nbn:se:ri:diva-81412DOI: 10.1116/6.0005393Scopus ID: 2-s2.0-105034723429OAI: oai:DiVA.org:ri-81412DiVA, id: diva2:2054198
Note

QC 20260420

Available from: 2026-04-20 Created: 2026-04-20 Last updated: 2026-04-20Bibliographically approved

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Zakrisson, JohanZelan, Martin

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