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Single Event Effects in 3.3 kV 4H-SiC MOSFETs Due to MeV Ion Impact
KTH Royal Institute of Technology, Sweden.
RISE Research Institutes of Sweden, Digital Systems, Smart Hardware.ORCID iD: 0000-0002-9850-9440
KTH Royal Institute of Technology, Sweden.
RISE Research Institutes of Sweden, Digital Systems, Smart Hardware.ORCID iD: 0009-0008-1972-0004
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2024 (English)In: Solid State Phenomena, ISSN 1012-0394, E-ISSN 1662-9779, Vol. 361, p. 77-83Article in journal (Refereed) Published
Abstract [en]

In this work, MeV alpha particles generated from an accelerator are used to study single event breakdown (SEB) in 4H-SiC MOSFET samples, rated at 3.3 kV. The samples are exposed to bursts of alpha particles under reverse bias conditions to investigate the SEB sensitivity to ion energy and reverse bias. The energies of alpha particles are chosen to reach different depths in the drift region of the MOSFET devices, and also to penetrate the whole drift region. Forward and reverse characteristics are measured after each exposure, as long as no failures occur, to ensure that the device performance is maintained. The measurements show that no significant effects are observed on the drain-source leakage current, while minor effects on gate behavior can be seen as a function of accumulated fluence. Furthermore, SEB can only be triggered with a reverse bias larger than, or equal to 3 kV. A standard MOSFET cell with a similar rated voltage is also simulated in Sentaurus TCAD to study these effects, using two different models for the incident ion-induced ionization: the Alpha Particle and the Heavy Ion model. Simulations show that the Alpha Particle model cannot induce any device failures even with a 3.5 kV reverse bias, while it is possible to trigger a failure by the Heavy Ion model, where the ionization can be selected. Carrier plasma and internal electric field distributions of the two models are plotted and compared, showing that device failures triggered by a heavy ion are related to the hole injection at epi-substrate interface, in which linear energy transfer (LET) of the particle plays an important role.

Place, publisher, year, edition, pages
Trans Tech Publications Ltd , 2024. Vol. 361, p. 77-83
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Physical Sciences
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URN: urn:nbn:se:ri:diva-76189DOI: 10.4028/p-90XrjkScopus ID: 2-s2.0-85204869783OAI: oai:DiVA.org:ri-76189DiVA, id: diva2:1914204
Note

This work is supported by the European Union’s Horizon 2020 research and innovation programme under grant agreement no 101015423 (project Recet4Rail) and by the EU KDT JU under grant agreement no 101096387 (project PowerizeD). The Ion Technology Centre at Uppsala University, Sweden, is acknowledged for MeV implantations and Mitsubishi Electric for supplying engineering samples for this research.

Available from: 2024-11-18 Created: 2024-11-18 Last updated: 2025-09-23Bibliographically approved

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Lim, Jang-KwonKrishna Murthy, HithikshaBakowski, Mietek

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