A micromachined coupled-cantilever for piezoelectric energy harvestersShow others and affiliations
2018 (English)In: Micromachines, E-ISSN 2072-666X, Vol. 9, no 5, article id 252
Article in journal (Refereed) Published
Abstract [en]
This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things
Place, publisher, year, edition, pages
MDPI AG , 2018. Vol. 9, no 5, article id 252
Keywords [en]
Bandwidth broadening, Coupled cantilevers, Enhanced stress distribution, Finite element modeling, Lead zirconate titanate, Microelectromechanical systems (MEMS), Piezoelectric micro-energy harvester, Bandwidth, Conversion efficiency, Degrees of freedom (mechanics), Display devices, Electromechanical devices, Energy harvesting, Finite element method, MEMS, Piezoelectricity, Stress concentration, High energy conversions, Micro electromechanical system (MEMS), Micro energy, Piezoelectric energy harvesters, Two degrees of freedom, Vibrational energies, Nanocantilevers
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-40182DOI: 10.3390/mi9050252Scopus ID: 2-s2.0-85060995701OAI: oai:DiVA.org:ri-40182DiVA, id: diva2:1357017
2019-10-022019-10-022025-09-23Bibliographically approved