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New low-stress PECVD Poly-SiGe Layers for MEMS
Rusu, C
RISE, Swedish ICT, Acreo.
Sedky, S
Parmentier, B
Verbist, A
Richard, O
Brijs, B
Geenen, L
Witvrouw, A
Show others and affiliations
2003 (English)
In:
Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 12, no 6, p. 816-825
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2003. Vol. 12, no 6, p. 816-825
National Category
Computer and Information Sciences
Identifiers
URN:
urn:nbn:se:ri:diva-31984
OAI: oai:DiVA.org:ri-31984
DiVA, id:
diva2:1151842
Available from:
2017-10-24
Created:
2017-10-24
Last updated:
2025-09-23
Bibliographically approved
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Acreo
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Journal of microelectromechanical systems
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Computer and Information Sciences
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ieee
modern-language-association-8th-edition
vancouver
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apa
ieee
modern-language-association-8th-edition
vancouver
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en-GB
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