Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams
2016 (Engelska)Ingår i: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 773, nr 1, artikel-id 012080
Artikel i tidskrift (Refereegranskat) Published
Abstract [en]
During the manufacturing of MEMS components, slanted beams can be produced in the etching process. We show that this can be used to produce skew motion that causes deflection of a proof mass out of the device plane also when the excitation is confined to the device plane. This allows construction of an energy harvester that uses a planar manufacturing process and produces power also with in-plane excitation. To obtain this with traditional methods it would be necessary to manufacture separate components and then mount them with their sensitive axes orthogonal to each other.
Ort, förlag, år, upplaga, sidor
2016. Vol. 773, nr 1, artikel-id 012080
Nyckelord [en]
Energy conversion, Manufacture, Nanotechnology, Energy Harvester, Etching process, Manufacturing process, Multi-Axis, Piezoelectric energy harvesting, Proof mass, Slanted beams, Energy harvesting
Nationell ämneskategori
Data- och informationsvetenskap
Identifikatorer
URN: urn:nbn:se:ri:diva-32557DOI: 10.1088/1742-6596/773/1/012080Scopus ID: 2-s2.0-85009820189OAI: oai:DiVA.org:ri-32557DiVA, id: diva2:1155619
Konferens
16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), December 6-9, 2016, Paris, France
2017-11-082017-11-082025-09-23Bibliografiskt granskad