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Epitaxial growth of by reactive high-power impulse magnetron sputtering
RISE., SP – Sveriges Tekniska Forskningsinstitut, SP Elektronik. Linköping University, Sweden.
Linköping University, Sweden.
Linköping University, Sweden.
Linköping University, Sweden.
2014 (engelsk)Inngår i: AIP Advances, E-ISSN 2158-3226, Vol. 4, nr 1, artikkel-id 017138Artikkel i tidsskrift (Fagfellevurdert) Published
Abstract [en]

Al2O3 was deposited by reactive high-power impulse magnetron sputtering at 600 C onto pre-deposited Ti2AlC(0001) thin films on Al2O3(0001) substrates. The Al2O 3 was deposited to a thickness of 65 nm and formed an adherent layer of epitaxial γ-Al2O3(111) as shown by transmission electron microscopy. The demonstration of epitaxial growth of γ-Al 2O3 on Ti2AlC(0001) open prospects for growth of crystalline alumina as protective coatings on Ti2AlC and related nanolaminated materials. The crystallographic orientation relationships are γ-Al2O3(111)//Ti2AlC(0001) (out-of-plane) and Al2O3//Ti2AlC(112̄0)γ-Al 2O3(22̄0)// Ti 2 AlC (112̄0) (in-plane) as determined by electron diffraction. Annealing in vacuum at 900 C resulted in partial decomposition of the Ti2AlC by depletion of Al and diffusion into and through the γ-Al2O3 layer.

sted, utgiver, år, opplag, sider
2014. Vol. 4, nr 1, artikkel-id 017138
Emneord [en]
Annealing in vacuum, Crystallographic orientation relationships, Out-of-plane, Partial decomposition, Alumina, Epitaxial growth, Growth (materials), Magnetron sputtering, Protective coatings, Transmission electron microscopy, Aluminum
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Identifikatorer
URN: urn:nbn:se:ri:diva-46433DOI: 10.1063/1.4863560Scopus ID: 2-s2.0-84893838954OAI: oai:DiVA.org:ri-46433DiVA, id: diva2:1460906
Tilgjengelig fra: 2020-08-25 Laget: 2020-08-25 Sist oppdatert: 2025-09-23bibliografisk kontrollert

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