Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, Netherlands.
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, Braunschweig, 38116, Germany.
Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, Netherlands.
Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, Berlin, 10587, Germany.
Laboratoire Commun de Métrologie LNE-Cnam, 61 rue eu Landy, Saint Denis, 93210, France; Laboratoire Kastler Brossel, Sorbonne Université, ENS-Université PSL, Collège de France, CNRS, 4 Place Jussieu, Paris, 75005, France.
Metrologia Applicata e Ingegneria, Istituto Nazionale di Ricerca Metrologica (INRiM), Strada delle Cacce 91, Torino, 10135, Italy.
Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, Braunschweig, 38116, Germany.
Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, Berlin, 10587, Germany.
National Physical Laboratory, Teddington, TW11 0LW, United Kingdom; James Watt School of Engineering, College of Science and Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom.
James Watt School of Engineering, College of Science and Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom.
Centre de Nanosciences et de Nanotechnologies, CNRS, Université Paris Saclay, 10 Bd Thomas Gobert, Palaiseau, 91120, France.
Centro Español de Metrologia, Calle del Alfar 2, Madrid, Tres Cantos, 28760, Spain.
Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, Netherlands.
Laboratoire Commun de Métrologie LNE-Cnam, 61 rue eu Landy, Saint Denis, 93210, France.
VTT Technical Research Centre of Finland Ltd, P.O. Box 1000, FI-02044, Espoo, 02150, Finland.
Technologien der Mikroperipherik, Technical University of Berlin, Gustav-Meyer-Allee 25, Berlin, 13355, Germany.
RISE Research Institutes of Sweden, Safety and Transport, Measurement Technology.
Centro Español de Metrologia, Calle del Alfar 2, Madrid, Tres Cantos, 28760, Spain.
Physikalisch-Technische Bundesanstalt (PTB), Abbestraße 2-12, Berlin, 10587, Germany.
Laboratoire Commun de Métrologie LNE-Cnam, 61 rue eu Landy, Saint Denis, 93210, France.
Laboratoire Commun de Métrologie LNE-Cnam, 61 rue eu Landy, Saint Denis, 93210, France.
Department of Precision and Microsystems Engineering, Delft University of Technology, Delft, 2628 CD, Netherlands.
Laboratoire Kastler Brossel, Sorbonne Université, ENS-Université PSL, Collège de France, CNRS, 4 Place Jussieu, Paris, 75005, France.
James Watt School of Engineering, College of Science and Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom.
National Metrology Institute VTT MIKES, P.O. Box 1000, VTT, FI-02044, Espoo, 02150, Finland.
Laboratoire Commun de Métrologie LNE-Cnam, 61 rue eu Landy, Saint Denis, 93210, France; Physikalisch-Technische Bundesanstalt (PTB), Bundesallee 100, Braunschweig, 38116, Germany.
James Watt School of Engineering, College of Science and Engineering, University of Glasgow, Glasgow, G12 8LT, United Kingdom.
Technologien der Mikroperipherik, Technical University of Berlin, Gustav-Meyer-Allee 25, Berlin, 13355, Germany.
RISE Research Institutes of Sweden, Safety and Transport, Measurement Technology.
IHP—Leibniz-Institut für Innovative Mikroelektronik, Im Technologiepark 25, Frankfurt (Oder), 15236, Germany; Institut für Hochfrequenz-und Halbleiter-Systemtechnologien, Technische Universität Berlin, FG Silizium-Photonik, Einsteinufer 25, Berlin, 10587, Germany.