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  • 1. Bring, M
    et al.
    Sanz-Velasco, A
    Rodjegard, H
    RISE, Swedish ICT, SICS, Imego.
    Enoksson, P
    Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding,2003In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 13, no 4, p. s51-61Article in journal (Refereed)
  • 2. Elderstig, H
    et al.
    Larsson, O
    RISE, Swedish ICT, Acreo.
    Polymeric MST - high precision at low cost1999In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 7, no 3Article in journal (Refereed)
  • 3. Najmzadeh, M
    et al.
    Hassl, S
    RISE, Swedish ICT, SICS, Imego.
    Enoksson, P
    A silicon straight tube fluid density sensor2007In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 17, p. 1657-63Article in journal (Refereed)
  • 4.
    Olsson, A
    et al.
    RISE, Swedish ICT, Acreo.
    Stemme, G
    Stemme, E
    A numerical design study of the valveless diffuser pump using a lumped-mass model1999In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 9, p. 34-Article in journal (Refereed)
  • 5.
    Rusu, C
    et al.
    RISE, Swedish ICT, Acreo.
    Persson, K
    RISE, Swedish ICT, Acreo.
    Ottosson, B
    Billger, D
    LTCC interconnects in Microsystems2013In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 16, no 6, p. 13-18Article in journal (Refereed)
  • 6. Rödjegård, H
    et al.
    Andersson, G I
    RISE, Swedish ICT, Acreo.
    Löfgren, M
    Rusu, C
    RISE, Swedish ICT, Acreo.
    Billger, D
    Capacitive slanted-beam three-axis accelerometer, Part 1: Modelling design2005In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 15, p. 1989-96Article in journal (Refereed)
  • 7. Rödjegård, H
    et al.
    Andersson, G I
    RISE, Swedish ICT, Acreo.
    Löfgren, M
    Rusu, C
    RISE, Swedish ICT, Acreo.
    Billger, D
    Capacitive slanted-beam three-axis accelerometer, Part 2: Characterisation2005In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 15, p. 1997-2002Article in journal (Refereed)
  • 8. Sanz-Velasco, A
    et al.
    Rödjegård, H
    RISE, Swedish ICT, SICS, Imego.
    Andersson, GI
    Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding2002In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 12, p. 786-94Article in journal (Refereed)
1 - 8 of 8
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