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  • 1. Nafari, A
    et al.
    Karlen, D
    Rusu, C
    RISE, Swedish ICT, Acreo.
    Svensson, K
    Olin, H
    Enoksson, P
    MEMS Sensor For In Situ Tem Atomic Force Microscopy2008In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 17, p. 328-333Article in journal (Refereed)
  • 2.
    Rusu, C
    et al.
    RISE, Swedish ICT, Acreo.
    Sedky, S
    Parmentier, B
    Verbist, A
    Richard, O
    Brijs, B
    Geenen, L
    Witvrouw, A
    New low-stress PECVD Poly-SiGe Layers for MEMS2003In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 12, no 6, p. 816-825Article in journal (Refereed)
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