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Microshutters for MEMS-based time-of-flight measurements in space
RISE, Swerea, Swerea IVF.
Chalmers University of Technology.
Swedish Institute of Space Physics.
Swedish Institute of Space Physics.
Show others and affiliations
2011 (English)In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2011, p. 597-600Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on the fabrication, integration and first operation of a mechanical microshutter in a time-of-flight (TOF) based ion detector in space. The microshutter is fabricated from a silicon on insulator (SOI) wafer and operated in a resonance mode, 306 kHz. Open time of the shutter is 100 ns. The microshutters are integrated in the PRIMA instrument, which is part of the payload on the Swedish PRISMA mission. PRISMA was successfully launched into low Earth orbit on June 15, 2010.

Place, publisher, year, edition, pages
2011. p. 597-600
Series
Micro Electro Mechanical Systems (MEMS), ISSN 1084-6999
National Category
Materials Engineering
Identifiers
URN: urn:nbn:se:ri:diva-13429DOI: 10.1109/MEMSYS.2011.5734495Scopus ID: 2-s2.0-79953767415ISBN: 9781424496327 (print)OAI: oai:DiVA.org:ri-13429DiVA, id: diva2:973636
Conference
24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011
Available from: 2016-09-22 Created: 2016-09-22Bibliographically approved

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