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Step response of vacuum sensors: A preliminary study
RISE, SP – Sveriges Tekniska Forskningsinstitut, SP Mätteknik, Massa, kraft, längd och tryck.ORCID iD: 0000-0001-9309-9262
2012 (English)In: 20th IMEKO World Congress 2012, 2012, Vol. 3, p. 1816-1818p. 1816-1818Conference paper, Published paper (Refereed)
Abstract [en]

The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20ms.
Place, publisher, year, edition, pages
2012. Vol. 3, p. 1816-1818p. 1816-1818
Keywords [en]
Dynamic pressure, Step response, Vacuum gauge
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-12547Scopus ID: 2-s2.0-84880445803Local ID: 23995OAI: oai:DiVA.org:ri-12547DiVA, id: diva2:970371
Conference
20th IMEKO World Congress 2012; Busan; South Korea; 9-14 Sept., 2012
Available from: 2016-09-13 Created: 2016-09-13 Last updated: 2024-03-25Bibliographically approved

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Arrhén, Fredrik

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