Step response of vacuum sensors : A preliminary study

Arrhén, Fredrik

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Step response of vacuum sensors: A preliminary study

Arrhén, Fredrik

RISE, SP – Sveriges Tekniska Forskningsinstitut, SP Mätteknik, Massa, kraft, längd och tryck.

2012 (English)In: 20th IMEKO World Congress 2012, 2012, Vol. 3, p. 1816-1818p. 1816-1818Conference paper, Published paper (Refereed)

Abstract [en]

The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20ms.

Place, publisher, year, edition, pages

2012. Vol. 3, p. 1816-1818p. 1816-1818

Keywords [en]

Dynamic pressure, Step response, Vacuum gauge

National Category

Natural Sciences

Identifiers

URN: urn:nbn:se:ri:diva-12547Scopus ID: 2-s2.0-84880445803Local ID: 23995OAI: oai:DiVA.org:ri-12547DiVA, id: diva2:970371

Conference

20th IMEKO World Congress 2012; Busan; South Korea; 9-14 Sept., 2012

Available from: 2016-09-13 Created: 2016-09-13 Last updated: 2021-01-08Bibliographically approved

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urn-nbn

Total: 36 hits