The effect of prior thermal treatment on radiation sensitization were investigated on proton irradiated Type 304 stainless steel (SS) of initially as-received (AR) and thermal-sensitized (SEN) conditions. The Cr depletion profiles were measured by field emission gun transmission electron microscopy/energy dispersive spectroscopy (FEGTEM, EDS), and were calculated by a radiation induced segregation (RIS) model. The different initial conditions were input in the RIS model calculations. For the as-received condition, the initial Cr profile was modeled by a uniform concentration distribution. Overall, the results show that radiation sensitization is characterized by a very narrow Cr depleted zone.