Step response of vacuum sensors - A preliminary study 2012 (English)In: 20th IMEKO World Congress 2012, 2012, p. 1816-1818Conference paper, Published paper (Refereed)

Abstract [en]

The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20ms. 

Place, publisher, year, edition, pages

2012. p. 1816-1818

Keywords [en]

Dynamic pressure, Step response, Vacuum gauge, Dynamic pressures, Internal volume, Preliminary studies, Vacuum gauges, Vacuum sensors, Atmospheric pressure, Vacuum gages

National Category

Engineering and Technology

Identifiers

URN: urn:nbn:se:ri:diva-72453Scopus ID: 2-s2.0-84880445803ISBN: 9781627481908 (print)OAI: oai:DiVA.org:ri-72453DiVA, id: diva2:1846905

Conference

20th IMEKO World Congress 2012, 9 September 2012 through 14 September 2012, Busan

Available from: 2024-03-25 Created: 2024-03-25 Last updated: 2024-03-25Bibliographically approved

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Arrhén, Fredrik

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Arrhén, Fredrik

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SP Mätteknik

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