Amorphous p-Type Conducting Zn–xIr Oxide (x > 0.13) Thin Films Deposited by Reactive Magnetron CosputteringShow others and affiliations
2022 (English)In: Physica status solidi. B, Basic research, ISSN 0370-1972, E-ISSN 1521-3951, Vol. 259, no 2, article id 2100374Article in journal (Refereed) Published
Abstract [en]
Zinc–iridium oxide (Zn–Ir–O) thin films have been demonstrated as a p-type conducting material. However, the stability of p-type conductivity with respect to chemical composition or temperature is still unclear. In this study we discuss the local atomic structure and the electrical properties of Zn–Ir–O films in the large Ir concentration range. The films are deposited by reactive DC magnetron co-sputtering at two different substrate temperatures—without intentional heating and at 300 °C. Extended X-ray absorption fine structure (EXAFS) analysis reveals that strongly disordered ZnO4 tetrahedra are the main Zn complexes in Zn–Ir–O films with up to 67.4 at% Ir. As the Ir concentration increases, an effective increase of Ir oxidation state is observed. Reverse Monte Carlo analysis of EXAFS at Zn K-edge shows that the average Zn–O interatomic distance and disorder factor increase with the Ir concentration. We observed that the nano-crystalline w-ZnO structure is preserved in a wider Ir concentration range if the substrate is heated during deposition. At low Ir concentration, the transition from n- to p-type conductivity is observed regardless of the temperature of the substrates. Electrical resistivity decreases exponentially with the Ir concentration in the Zn–Ir–O films.
Place, publisher, year, edition, pages
John Wiley and Sons Inc , 2022. Vol. 259, no 2, article id 2100374
Keywords [en]
amorphous thin films, p-type conductivity, reactive magnetron co-sputtering, RMC-EXAFS, X-ray absorption spectroscopy, zinc–iridium oxide, Chemical stability, Conductive films, Extended X ray absorption fine structure spectroscopy, II-VI semiconductors, Iridium compounds, Oxide films, Substrates, Zinc oxide, Extended X-ray absorption fine structures, Iridium oxides, P type conductivity, P-type, RMC-extended X-ray absorption fine structure, Thin-films, Thin films
National Category
Condensed Matter Physics
Identifiers
URN: urn:nbn:se:ri:diva-57070DOI: 10.1002/pssb.202100374Scopus ID: 2-s2.0-85118861390OAI: oai:DiVA.org:ri-57070DiVA, id: diva2:1614220
Note
Funding details: 739508; Funding details: European Regional Development Fund, ERDF, 1.1.1.1/18/A/073; Funding text 1: The authors greatly acknowledge the financial support via ERDF Project No. 1.1.1.1/18/A/073. The authors are greatly indebted to prof. Anders Hallén (KTH) and prof. Mattias Hammar (KTH) for many stimulating discussions. Institute of Solid State Physics, University of Latvia as the Center of Excellence has received funding from the European Union's Horizon 2020 Framework Programme H2020‐WIDESPREAD‐01‐2016‐2017‐TeamingPhase2 under grant agreement No. 739508, project CAMART2.
2021-11-242021-11-242022-02-22Bibliographically approved