Electrons on a straight path: A novel ionisation vacuum gauge suitable as reference standardShow others and affiliations
2021 (English)In: Vacuum, ISSN 0042-207X, E-ISSN 1879-2715, Vol. 189, article id 110239Article in journal (Refereed) Published
Abstract [en]
The consortium of the European project 16NRM05 designed a novel ionisation vacuum gauge in which the electrons take a straight path from the emitting cathode through the ionisation space into a Faraday cup. Compared to existing ionisation vacuum gauges, this has the advantage that the electron path length is well defined. It is independent of the point and angle of emission and is not affected by space charge around the collector. In addition, the electrons do not hit the anode where they can be reflected, generate secondary electrons or cause desorption of neutrals or ions. This design was chosen in order to develop a more stable ionisation vacuum gauge suitable as reference standard in the range of 10−6 Pa to 10−2 Pa for calibration purposes of other vacuum gauges and quadrupole mass spectrometers. Prototype gauges were produced by two different manufacturers and showed predictable sensitivities with a very small spread (<1.5%), very good short-term repeatability (<0.05%) and reproducibility (<1%), even after changing the emission cathode and drop-down tests. These characteristics make the gauge also attractive for industrial applications, because a gauge exchange does not require calibration or re-adjustment of a process.
Place, publisher, year, edition, pages
Elsevier Ltd , 2021. Vol. 189, article id 110239
Keywords [en]
Hot cathode, Ion induced secondary electron yield, Ionisation vacuum gauge, Secondary electrons, Sensitivity, Calibration, Cathodes, Electrons, Industrial emissions, Ionization, Vacuum gages, Electron path, European project, Faraday cups, Hot cathodes, Ionization vacuum gauge, Reference standard, Vacuum gauges, Secondary emission
National Category
Fusion, Plasma and Space Physics
Identifiers
URN: urn:nbn:se:ri:diva-53012DOI: 10.1016/j.vacuum.2021.110239Scopus ID: 2-s2.0-85104306617OAI: oai:DiVA.org:ri-53012DiVA, id: diva2:1556450
Note
Funding details: UID/FIS/00068/2019; Funding details: European Metrology Programme for Innovation and Research, EMPIR; Funding details: Horizon 2020; Funding text 1: The authors are glad to have written this paper in honour of the anniversary of John Colligon as editor, who supported in this role vacuum science and metrology for 40 years. The authors are also very grateful to M. W?est and F. Scuderi from the INFICON AG, and M. Granovskij and Chris Gruber from the VACOM GmbH company for the professional manufacturing of the prototype gauges. INFICON also supported us with simulations by the COMSOL package. Authors from PTB are grateful to Dietmar Drung and Martin G?tz for the development and calibration of the ultra-stable low-noise current amplifier (ULCA). This project 16NRM05 Ion gauge has received funding from the EMPIR programme co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme, and the Portuguese National Funding Agency for Science, Research and Technology in the framework of the project UID/FIS/00068/2019.; Funding text 2: The authors are glad to have written this paper in honour of the anniversary of John Colligon as editor, who supported in this role vacuum science and metrology for 40 years. The authors are also very grateful to M. Wüest and F. Scuderi from the INFICON AG, and M. Granovskij and Chris Gruber from the VACOM GmbH company for the professional manufacturing of the prototype gauges. INFICON also supported us with simulations by the COMSOL package. Authors from PTB are grateful to Dietmar Drung and Martin Götz for the development and calibration of the ultra-stable low-noise current amplifier (ULCA). This project 16NRM05 Ion gauge has received funding from the EMPIR programme co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation programme , and the Portuguese National Funding Agency for Science, Research and Technology in the framework of the project UID/FIS/00068/2019
2021-05-212021-05-212023-05-17Bibliographically approved