Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Measurement of groove depth standards in the range 1 μm up to 1 mm (EURAMET project 1407)
PTB, Germany.
BEV, Austria.
CEM, Spain.
GUM, Poland.
Show others and affiliations
2020 (English)In: Metrologia, ISSN 0026-1394, E-ISSN 1681-7575, Vol. 57, no 1 A, article id 04001Article in journal (Refereed) Published
Abstract [en]

A comparison measurement between 10 national metrology institutes on two types of depth setting standards was conducted using mostly tactile but also two optical instruments for measurement. Three etched silicon standards with depths of 5, 20 and 50 μm and one diamond turned nickel coated copper standard with depths of 200, 600 and 900 μm were measured. The cross section of the grooves was trapezoidal. Most of the participants confirmed their CMC entries. Since many measurements had to be made, contamination of the standards and heavy wear on the standards were also observed after the comparison was completed. The wear consists of indentation marks from stylus instruments on both types of standards and as many as 70 scratch marks on the nickel coated copper artefact used. This indicates that the contact pressure of the tactile measuring devices used by some partners was too high. This can be caused by a too high probing force or a too small probing tip radius. Thus, for future comparisons the actual probing force and actual tip radius need to be measured during the comparison by the participants to assure that the recommended values (2 μm tip radius and 0.7 mN probing force) are not exceeded. The recently published German standard DIN 32567-3 "Determination of the influence of materials on the optical and tactile dimensional metrology-Part 3: Derivation of correction values for tactile measuring devices" describes methods to do both. Main text To reach the main text of this paper, click on Final Report. Note that this text is that which appears in Appendix B of the BIPM key comparison database kcdb.bipm.org/. The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (CIPM MRA)

Place, publisher, year, edition, pages
Institute of Physics Publishing , 2020. Vol. 57, no 1 A, article id 04001
Keywords [en]
Wear of materials, Comparison measurement, Contact pressures, Dimensional Metrology, Key comparison database, Mutual recognition arrangements, National metrology institutes, Recommended values, Stylus instrument, Nickel coatings
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-51495DOI: 10.1088/0026-1394/57/1A/04001Scopus ID: 2-s2.0-85090594908OAI: oai:DiVA.org:ri-51495DiVA, id: diva2:1515365
Available from: 2021-01-08 Created: 2021-01-08 Last updated: 2021-05-04Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus

Authority records

Flys, Olena

Search in DiVA

By author/editor
Flys, Olena
By organisation
Measurement Technology
In the same journal
Metrologia
Natural Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 49 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf