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Heterogeneous 3D integration of 17 μm pitch Si/SiGe quantum well bolometer arrays for infrared imaging systems
KTH Royal Institute of Technology, Sweden.
KTH Royal Institute of Technology, Sweden.
KTH Royal Institute of Technology, Sweden.
RISE, Swedish ICT, Acreo.
Show others and affiliations
2013 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 23, no 4, article id 045017Article in journal (Refereed) Published
Abstract [en]

This paper reports on the realization of 17 μm × 17 μm pitch bolometer arrays for uncooled infrared imagers. Microbolometer arrays have been available in primarily defense applications since the mid-1980s and are typically based on deposited thin films on top of CMOS wafers that are surface-machined into sensor pixels. This paper instead focuses on the heterogeneous integration of monocrystalline Si/SiGe quantum-well-based thermistor material in a CMOS-compliant process using adhesive wafer bonding. The high-quality monocrystalline thermistor material opens up for potentially lower noise compared to commercially available uncooled microbolometer arrays together with a competitive temperature coefficient of resistance (TCR). Characterized bolometers had a TCR of -2.9% K-1 in vacuum, measured thermal conductances around 5 × 10-8 W K-1 and thermal time constants between 4.9 and 8.5 ms, depending on the design. Complications in the fabrication of stress-free bolometer legs and low-noise contacts are discussed and analyzed.

Place, publisher, year, edition, pages
2013. Vol. 23, no 4, article id 045017
Keywords [en]
Adhesive wafer bonding, Heterogeneous integration, Microbolometer arrays, Temperature coefficient of resistance, Thermal conductance, Thermal time constants, Thermistor materials, Uncooled microbolometers, Infrared detectors, Infrared imaging, Semiconductor quantum wells, Temperature sensors, Thermistors, Bolometers
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:ri:diva-49923DOI: 10.1088/0960-1317/23/4/045017Scopus ID: 2-s2.0-84878081474OAI: oai:DiVA.org:ri-49923DiVA, id: diva2:1484769
Available from: 2020-10-30 Created: 2020-10-30 Last updated: 2020-12-01Bibliographically approved

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