Stress-minimized packaging of inertial sensors using wire bondingShow others and affiliations
2013 (English)In: 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, p. 1962-1965, article id 6627179Conference paper, Published paper (Refereed)
Abstract [en]
This paper presents a packaging approach for inertial sensors using wire bonding technology. The die is mounted exclusively by bond wires on the front- and backside to the package. Conventional single-side die attach to substrates, such as gluing, is abandoned. The approach is characterized by its novel and symmetric die attach concept as well as its simplicity of applying a standard wire bonding process. The wire bond attachment facilitates significant reduction of thermally induced mechanical stresses. The attachment concept is characterized in terms of attachment stiffness and potential die resonances using Laser Doppler Vibrometry (LDV). White-light interferometry is used to investigate stress related warping that is induced by the die attachment process.
Place, publisher, year, edition, pages
2013. p. 1962-1965, article id 6627179
Keywords [en]
die attach, inertial sensors, Laser Doppler Vibrometry, Low-stress, packaging, white-light interferometry, wire bonding, Die-attach, Inertial sensor, Low stress, Actuators, Electronics packaging, Inertial navigation systems, Interferometry, Laser Doppler velocimeters, Microsystems, Solid-state sensors, Stresses
National Category
Engineering and Technology
Identifiers
URN: urn:nbn:se:ri:diva-47583DOI: 10.1109/Transducers.2013.6627179Scopus ID: 2-s2.0-84891708939ISBN: 9781467359818 (print)OAI: oai:DiVA.org:ri-47583DiVA, id: diva2:1463458
Conference
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 16 June 2013 through 20 June 2013, Barcelona
2020-09-022020-09-022020-12-01Bibliographically approved