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A novel cubic X-ray detector diode with isotropic response for high-energy radiation dosimetry
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.ORCID iD: 0009-0005-1022-8177
RISE, Swedish ICT, Acreo.ORCID iD: 0000-0001-9299-7132
RISE, Swedish ICT, Acreo.
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2013 (English)In: 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, p. 58-61, article id 6626700Conference paper, Published paper (Refereed)
Abstract [en]

A novel X-ray detector diode, optimized for angular independent (isotropic) dose response, is presented. The diode is designed as a silicon cube with pn-junctions on all six sides, which creates a close to 3D symmetrical device. The cube edge is 300 μm or 410 μm. It is manufactured by a micromachining based process featuring deep reactive ion etching of silicon-on-insulator substrates, doping of vertical walls from gas phase and refill of etched trenches with polysilicon. For 6 MV X-rays, in the ±30° beam angle range, the variation in detector response was at best ±0.5 % for a cubic diode compared to ±3.3 % for conventional diodes, a factor 7 improvement.

Place, publisher, year, edition, pages
2013. p. 58-61, article id 6626700
Keywords [en]
angular independence, cube, diode, dosimetry, isotropic response, radiation therapy, silicon, X-ray detector, Deep Reactive Ion Etching, Detector response, High-energy radiations, Silicon-on-insulator substrates, Actuators, Geometry, Microsystems, Radiotherapy, Solid-state sensors, X ray apparatus, X rays, Diodes
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Engineering and Technology
Identifiers
URN: urn:nbn:se:ri:diva-47662DOI: 10.1109/Transducers.2013.6626700Scopus ID: 2-s2.0-84891693811ISBN: 9781467359818 (print)OAI: oai:DiVA.org:ri-47662DiVA, id: diva2:1462016
Conference
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 16 June 2013 through 20 June 2013, Barcelona
Available from: 2020-08-28 Created: 2020-08-28 Last updated: 2024-05-22Bibliographically approved

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Öberg, OlofJunique, Stephane

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