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Template-assisted vapour-liquid-solid growth of InP nanowires on (001) InP and Si substrates
Lund University, Sweden.
Lund University, Sweden.
Lund University, Sweden.
Lund University, Sweden.
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2020 (English)In: Nanoscale, ISSN 2040-3364, E-ISSN 2040-3372, Vol. 12, no 2, p. 888-894Article in journal (Refereed) Published
Abstract [en]

We report on the synthesis of vertical InP nanowire arrays on (001) InP and Si substrates using template-assisted vapour-liquid-solid growth. A thick silicon oxide layer was first deposited on the substrates. The samples were then patterned by electron beam lithography and deep dry etching through the oxide layer down to the substrate surface. Gold seed particles were subsequently deposited in the holes of the pattern by the use of pulse electrodeposition. The subsequent growth of nanowires by the vapour-liquid-solid method was guided towards the [001] direction by the patterned oxide template, and displayed a high growth yield with respect to the array of holes in the template. In order to confirm the versatility and robustness of the process, we have also demonstrated guided growth of InP nanowire p-n junctions and InP/InAs/InP nanowire heterostructures on (001) InP substrates. Our results show a promising route to monolithically integrate III-V nanowire heterostructure devices with commercially viable (001) silicon platforms.

Place, publisher, year, edition, pages
Royal Society of Chemistry , 2020. Vol. 12, no 2, p. 888-894
Keywords [en]
Arsenic compounds, Dry etching, Electron beam lithography, Gold deposits, III-V semiconductors, Indium phosphide, Liquids, Nanowires, Semiconducting indium phosphide, Semiconductor junctions, Silicon compounds, Silicon oxides, Heterostructure devices, InP nanowire arrays, Nanowire heterostructures, Pulse electrodeposition, Silicon oxide layers, Silicon platforms, Substrate surface, Vapour-liquid-solid growths, Substrates
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-43360DOI: 10.1039/c9nr08025bScopus ID: 2-s2.0-85077403365OAI: oai:DiVA.org:ri-43360DiVA, id: diva2:1389396
Note

Funding details: Energimyndigheten, P364543; Funding details: Knut och Alice Wallenbergs Stiftelse, P2016.0089; Funding text 1: Authors are thankful to Dr Yuwei Zhang and MSc Mohammad Karimi for valuable discussions. The authors acknowledge financial support from NanoLund, the Knut and Alice Wallenberg Foundation (project: P2016.0089), the Swedish Energy Agency (project: P364543), the Swedish Research Council and Halmstad University.

Available from: 2020-01-29 Created: 2020-01-29 Last updated: 2020-01-29Bibliographically approved

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