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MEMS meander harvester with tungsten proof-mass
Chalmers University of Technology, Sweden.
RISE - Research Institutes of Sweden (2017-2019), ICT, Acreo.
RISE - Research Institutes of Sweden (2017-2019), ICT, Acreo.
RISE - Research Institutes of Sweden (2017-2019), ICT, Acreo.
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2019 (English)In: Journal of Physics: Conference Series, Institute of Physics Publishing , 2019, no 1Conference paper, Published paper (Refereed)
Abstract [en]

Using current battery technology the life-time of a leadless pacemaker is approximately 6-10 years, with a large portion of the pacemaker occupied by the battery. This paper investigates the possibility to use a MEMS piezoelectric harvester as a complementary energy source in leadless pacemakers. The challenge is to combine the low resonance frequency required to harvest energy from a heartbeat with the small volume of 20×4×3 mm3 available, with the corresponding harvester displacement restricted to 2 mm. Due to the displacement restriction the selected structure was a double clamped bridge in order to reduce the mass displacement, with various meander-type designs simulated to reduce resonance frequency. To further reduce resonance frequency large proof-masses of tungsten were attached by gluing. Two types of tungsten proof-masses were added to four different harvesters, 16.4 mg and 16.6 mg on sample 1 and 2 and 502 mg and 492 mg proof-mass on sample 3 and 4. The structures have 2 μm patterned PZT (deposited by sol-gel technique) and Pt metal electrodes for d31 mode harvesting. The power output measured from one of the two PZT/electrodes was 0.13 nW with 50 μm deflection at 100 k Ω optimal load resistance and 9.1 mVpp at 232 Hz.

Place, publisher, year, edition, pages
Institute of Physics Publishing , 2019. no 1
Keywords [en]
Electric batteries, Harvesters, Nanotechnology, Natural frequencies, Sol-gels, Tungsten, Battery technology, Complementary energy, Large proof mass, Low resonance frequency, Mass displacement, Piezoelectric harvester, Resonance frequencies, Sol-gel technique, Energy conversion
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-43363DOI: 10.1088/1742-6596/1407/1/012121Scopus ID: 2-s2.0-85077813433OAI: oai:DiVA.org:ri-43363DiVA, id: diva2:1389355
Conference
18th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2018, 4 December 2018 through 7 December 2018
Note

Funding details: 644378; Funding text 1: This work has received funding from The European Union’s Horizon 2020 research and innovation programme under grant agreement No 644378, Smart-Memphis project.

Available from: 2020-01-29 Created: 2020-01-29 Last updated: 2020-01-29Bibliographically approved

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