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A micromachined coupled-cantilever for piezoelectric energy harvesters
Chalmers University of Technology, Sweden.
Chalmers University of Technology, Sweden.
RISE - Research Institutes of Sweden, ICT, Acreo.ORCID iD: 0000-0002-0459-1157
MyVox AB, Sweden.
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2018 (English)In: Micromachines, ISSN 2072-666X, E-ISSN 2072-666X, Vol. 9, no 5, article id 252Article in journal (Refereed) Published
Abstract [en]

This paper presents a demonstration of the feasibility of fabricating micro-cantilever harvesters with extended stress distribution and enhanced bandwidth by exploiting an M-shaped two-degrees-of-freedom design. The measured mechanical response of the fabricated device displays the predicted dual resonance peak behavior with the fundamental peak at the intended frequency. This design has the features of high energy conversion efficiency in a miniaturized environment where the available vibrational energy varies in frequency. It makes such a design suitable for future large volume production of integrated self powered sensors nodes for the Internet-of-Things

Place, publisher, year, edition, pages
MDPI AG , 2018. Vol. 9, no 5, article id 252
Keywords [en]
Bandwidth broadening, Coupled cantilevers, Enhanced stress distribution, Finite element modeling, Lead zirconate titanate, Microelectromechanical systems (MEMS), Piezoelectric micro-energy harvester, Bandwidth, Conversion efficiency, Degrees of freedom (mechanics), Display devices, Electromechanical devices, Energy harvesting, Finite element method, MEMS, Piezoelectricity, Stress concentration, High energy conversions, Micro electromechanical system (MEMS), Micro energy, Piezoelectric energy harvesters, Two degrees of freedom, Vibrational energies, Nanocantilevers
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-40182DOI: 10.3390/mi9050252OAI: oai:DiVA.org:ri-40182DiVA, id: diva2:1357017
Available from: 2019-10-02 Created: 2019-10-02 Last updated: 2019-10-02Bibliographically approved

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Publisher's full texthttps://www2.scopus.com/inward/record.uri?eid=2-s2.0-85060995701&doi=10.3390%2fmi9050252&partnerID=40&md5=c22981eeec61983462fc851e0afe54f1

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Rusu, Cristina

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