Drain-current deep level transient spectroscopy investigation on epitaxial graphene/6H-SiC field effect transistorsShow others and affiliations
2014 (English)In: Mater. Sci. Forum, 2014, p. 436-439Conference paper, Published paper (Refereed)
Abstract [en]
The electrically active deep levels in a graphene/silicon carbide field effect transistor (FET) were investigated by drain-current deep level transient spectroscopy (ID-DLTS). An evaluation procedure for ID-DLTS is developed in order to obtain the activation energy, the capture cross section and the trap concentration. We observed three defect centers corresponding to the intrinsic defects E1/E2, Ei and Z1/Z2 in n-type 6H-SiC. The determined parameters have been verified by conventional capacitance DLTS.
Place, publisher, year, edition, pages
2014. p. 436-439
Keywords [en]
Activation energy, Deep level transient spectroscopy, Defects, Silicon carbide, Capture cross sections, Deep-levels, Defect centers, Electrically actives, Epitaxial graphene, Intrinsic defects, Trap concentration, Field effect transistors
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-35503DOI: 10.4028/www.scientific.net/MSF.778-780.436Scopus ID: 2-s2.0-84896068228ISBN: 9783038350101 (print)OAI: oai:DiVA.org:ri-35503DiVA, id: diva2:1263112
Conference
29 September 2013 through 4 October 2013, Miyazaki
2018-11-142018-11-142020-12-01Bibliographically approved