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Simple method for quality factor estimation in resonating MEMS structures
Linköping University, Sweden.
RISE - Research Institutes of Sweden, ICT, Acreo.ORCID iD: 0000-0003-1793-4451
RISE - Research Institutes of Sweden, ICT, Acreo.
RISE - Research Institutes of Sweden, ICT, Acreo.
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2018 (English)In: Proceedings of the 17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, 2017, 2018, no 1Conference paper, Published paper (Refereed)
Abstract [en]

The quality factor of a packaged MEMS resonating structure depends on both the packaging pressure and the structure's proximity to the walls. This type of mechanical constraints, which causes energy dissipation from the structure to the surrounding air, are applicable for oscillating energy harvesters and should be considered in the design process. However, the modelling of energy losses or the measurements of their direct influence inside a packaged chip is not trivial. In this paper, a simple experimental method to quantify the energy loss in an oscillating MEMS structures due to the surrounding air is described together with preliminary results. The main advantage of the method is the ability to characterize the damping contributions under different vacuum and packaging conditions without requiring any packaging of the harvester chip or fabrication of multiple devices with different cavity depths. © Published under licence by IOP Publishing Ltd.

Place, publisher, year, edition, pages
2018. no 1
Keywords [en]
Energy conversion, Energy dissipation, Nanotechnology, Damping contribution, Energy Harvester, Experimental methods, Mechanical constraints, Multiple devices, Quality factor estimation, Quality factors, Resonating structures, Chip scale packages
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-34961DOI: 10.1088/1742-6596/1052/1/012100Scopus ID: 2-s2.0-85051331110OAI: oai:DiVA.org:ri-34961DiVA, id: diva2:1242447
Conference
17th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, PowerMEMS 2017, 14 November 2017 through 17 November 2017
Available from: 2018-08-28 Created: 2018-08-28 Last updated: 2019-06-27Bibliographically approved

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Johannisson, PontusRusu, Cristina

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CiteExportLink to record
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Citation style
  • apa
  • harvard1
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  • de-DE
  • en-GB
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Output format
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