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A valve-less planar pump isotropically etched in silicon
ORCID iD: 0000-0001-7933-3729
1995 (English)In: Micromechanics Europe 1995 (MME ’95), Copenhagen, Denmark, 1995Conference paper, Poster (with or without abstract) (Refereed)
Place, publisher, year, edition, pages
1995.
National Category
Engineering and Technology
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URN: urn:nbn:se:ri:diva-34147OAI: oai:DiVA.org:ri-34147DiVA, id: diva2:1232816
Conference
Micromechanics Europe 1995 (MME ’95), Copenhagen, Denmark
Available from: 2018-07-12 Created: 2018-07-12 Last updated: 2023-05-09Bibliographically approved

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Olsson, Anders

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