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A seat microvalve nozzle for optimal gas flow capacity at large controlled pressure
Van Der Wijngaart, W.
Thorsén, Anders
ORCID iD:
0000-0001-7933-3729
Stemme, G.
2004 (English)
In:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), p. 233-236
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2004. p. 233-236
National Category
Engineering and Technology
Identifiers
URN:
urn:nbn:se:ri:diva-34123
OAI: oai:DiVA.org:ri-34123
DiVA, id:
diva2:1232807
Available from:
2018-07-12
Created:
2018-07-12
Last updated:
2024-04-11
Bibliographically approved
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