Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.
2016 (English)In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 773, no 1, article id 012080Article in journal (Refereed) Published
Abstract [en]

During the manufacturing of MEMS components, slanted beams can be produced in the etching process. We show that this can be used to produce skew motion that causes deflection of a proof mass out of the device plane also when the excitation is confined to the device plane. This allows construction of an energy harvester that uses a planar manufacturing process and produces power also with in-plane excitation. To obtain this with traditional methods it would be necessary to manufacture separate components and then mount them with their sensitive axes orthogonal to each other.

Place, publisher, year, edition, pages
2016. Vol. 773, no 1, article id 012080
Keywords [en]
Energy conversion, Manufacture, Nanotechnology, Energy Harvester, Etching process, Manufacturing process, Multi-Axis, Piezoelectric energy harvesting, Proof mass, Slanted beams, Energy harvesting
National Category
Computer and Information Sciences
Identifiers
URN: urn:nbn:se:ri:diva-32557DOI: 10.1088/1742-6596/773/1/012080Scopus ID: 2-s2.0-85009820189OAI: oai:DiVA.org:ri-32557DiVA, id: diva2:1155619
Conference
PowerMEMS 2016. 6 December 2016 through 9 December 2016
Available from: 2017-11-08 Created: 2017-11-08 Last updated: 2018-01-13Bibliographically approved

Open Access in DiVA

No full text in DiVA

Other links

Publisher's full textScopus
By organisation
Acreo
In the same journal
Journal of Physics, Conference Series
Computer and Information Sciences

Search outside of DiVA

GoogleGoogle Scholar

doi
urn-nbn

Altmetric score

doi
urn-nbn
Total: 6 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • harvard1
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
v. 2.35.3