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Polymeric MST - high precision at low cost
Elderstig, H
Larsson, O
RISE, Swedish ICT, Acreo.
1999 (English)
In:
Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 7, no 3
Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1999. Vol. 7, no 3
National Category
Computer and Information Sciences
Identifiers
URN:
urn:nbn:se:ri:diva-32326
OAI: oai:DiVA.org:ri-32326
DiVA, id:
diva2:1152185
Available from:
2017-10-24
Created:
2017-10-24
Last updated:
2020-12-01
Bibliographically approved
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Acreo
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Journal of Micromechanics and Microengineering
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Computer and Information Sciences
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