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Polymeric MST - high precision at low cost
RISE, Swedish ICT, Acreo.
1999 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 7, no 3Article in journal (Refereed) Published
Place, publisher, year, edition, pages
1999. Vol. 7, no 3
National Category
Computer and Information Sciences
Identifiers
URN: urn:nbn:se:ri:diva-32326OAI: oai:DiVA.org:ri-32326DiVA, id: diva2:1152185
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2018-01-13Bibliographically approved

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