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Capacitive slanted-beam three-axis accelerometer, Part 1: Modelling design
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.
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2005 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 15, p. 1989-96Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2005. Vol. 15, p. 1989-96
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Computer and Information Sciences
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URN: urn:nbn:se:ri:diva-32190OAI: oai:DiVA.org:ri-32190DiVA, id: diva2:1152049
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2020-12-01Bibliographically approved

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