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Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding
RISE, Swedish ICT, SICS, Imego.
2002 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 12, p. 786-94Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2002. Vol. 12, p. 786-94
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Computer and Information Sciences
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URN: urn:nbn:se:ri:diva-31988OAI: oai:DiVA.org:ri-31988DiVA, id: diva2:1151846
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2018-01-13Bibliographically approved

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CiteExportLink to record
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