Change search
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf
Micro pinball game demonstrating an easy MEMS transfer process using room temperature plasma bonding,
RISE, Swedish ICT, SICS, Imego.
2003 (English)In: Journal of Micromechanics and Microengineering, ISSN 0960-1317, E-ISSN 1361-6439, Vol. 13, no 4, p. s51-61Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2003. Vol. 13, no 4, p. s51-61
National Category
Computer and Information Sciences
Identifiers
URN: urn:nbn:se:ri:diva-31986OAI: oai:DiVA.org:ri-31986DiVA, id: diva2:1151844
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2020-12-01Bibliographically approved

Open Access in DiVA

No full text in DiVA

By organisation
Imego
In the same journal
Journal of Micromechanics and Microengineering
Computer and Information Sciences

Search outside of DiVA

GoogleGoogle Scholar

urn-nbn

Altmetric score

urn-nbn
Total: 100 hits
CiteExportLink to record
Permanent link

Direct link
Cite
Citation style
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Other style
More styles
Language
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Other locale
More languages
Output format
  • html
  • text
  • asciidoc
  • rtf