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Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial encapsulation layer
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2004 (English)In: Sensors and Actuators A-Physical, ISSN 0924-4247, E-ISSN 1873-3069, Vol. 114, p. 355-361Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2004. Vol. 114, p. 355-361
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Computer and Information Sciences
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URN: urn:nbn:se:ri:diva-31982OAI: oai:DiVA.org:ri-31982DiVA, id: diva2:1151840
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2020-12-01Bibliographically approved

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