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MEMS Sensor For In Situ Tem Atomic Force Microscopy
RISE, Swedish ICT, Acreo.
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2008 (English)In: Journal of microelectromechanical systems, ISSN 1057-7157, E-ISSN 1941-0158, Vol. 17, p. 328-333Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2008. Vol. 17, p. 328-333
National Category
Computer and Information Sciences
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URN: urn:nbn:se:ri:diva-31971OAI: oai:DiVA.org:ri-31971DiVA, id: diva2:1151829
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2020-12-01Bibliographically approved

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