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A novel 3-axis monolithic silicon accelerometer
RISE, Swedish ICT, Acreo, Sensor Systems.
1995 (English)In: Digest of Techn. Papers, The 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers ‘95/ Eurosensors IX), Volume II, pp. 558-561., 1995Conference paper, Published paper (Refereed)
Abstract [en]

Working prototypes of a novel 3 axis monolithic silicon accelerometer have been manufactured at Chalmers University of Technology in co operation with Saab Combitech AB and the Department of Solid State Electronics. Experience from the prototypes is most encouraging as they have confirmed the theoretical predictions of negligible cross-axis sensitivity. The accuracy in the separation of an arbitrary directed acceleration into acceleration vectors in a Cartesian system of coordinates has shown to be high almost beyond expectation. The accelerometer has good potential to develop into a low cost 3 axis accelerometer in the 0 2 g range with a resolution of about 10 mg. This in part due to the simple manufacturing process.

Place, publisher, year, edition, pages
1995.
Keywords [en]
MEMS, 3-axis, Accelerometer, Quad-Slanted Beam
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:ri:diva-25153ISBN: 91-630-3473-5 (print)OAI: oai:DiVA.org:ri-25153DiVA, id: diva2:1132694
Conference
Stockholm, Sweden, Sunday, June 25, 1995
Projects
MEMS InertialAvailable from: 2018-04-14 Created: 2016-10-31 Last updated: 2018-04-14Bibliographically approved

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Total: 11 hits
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