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A theoretical and experimental comparison of 4H- and 6H-SiC MSM UV photodetectors
RISE, Swedish ICT, Acreo. KTH, Elektrisk energiomvandling.ORCID iD: 0000-0002-9850-9440
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.
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2012 (English)In: Silicon Carbide and Related Materials 2011, Trans Tech Publications Inc. , 2012, 1207-1210 p.Conference paper, Published paper (Refereed)
Abstract [en]

This paper reports on fabrication and modeling of 4H- and 6H-SiC metal-semiconductor-metal (MSM) photodetectors (PDs). MSM PDs have been fabricated on 4H-SiC and 6H-SiC epitaxial layers, and their performance analyzed by MEDICI simulation and measurements. The simulations were also used to optimize the sensitivity by varying the width and spacing of the interdigitated electrodes. The fabricated PDs with 2 ÎŒm wide metal electrodes and 3 ÎŒm spacing between the electrodes exhibited, under UV illumination, a peak current to dark current ratio of 10 5 and 10 4 in 4H-SiC and 6H-SiC, respectively. The measured spectral responsivity of 6H-SiC PDs was higher compared to that of 4H-SiC PDs, with a cutoff at 407 nm compared to 384 nm in 4H-SiC PDs. Also the peak responsivity occurred at a shorter wavelength in 6H material. A high rejection ratio between the photocurrent and dark current was found in both cases. These experimental results were in agreement with simulation.

Place, publisher, year, edition, pages
Trans Tech Publications Inc. , 2012. 1207-1210 p.
Series
Materials Science Forum, ISSN 0255-5476 ; 717-720
Keyword [en]
MSM (metal-semiconductor-metal), PDs (photodetectors), UV photodetector SiC
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
URN: urn:nbn:se:ri:diva-27959DOI: 10.4028/www.scientific.net/MSF.717-720.1207ISI: 000309431000289Scopus ID: 2-s2.0-84861401605ISBN: 978-3-03785-419-8 (print)OAI: oai:DiVA.org:ri-27959DiVA: diva2:1069777
Conference
14th International Conference on Silicon Carbide and Related Materials 2011, ICSCRM 2011; Cleveland, OH; 11 September 2011 through 16 September 2011
Available from: 2012-08-08 Created: 2017-01-30Bibliographically approved

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Lim, Jang-KwonNee, Hans-Peter

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