Plasma polymers of three isomers of diaminocyclohexane (DACH) were deposited on polyethylene, SiO2, and mica at 20 °C. The deposition rate was measured as a function of plasma density and power; a maximum was observed in the latter function. The deposition rate was highest for the monomer with the highest flow rate. The film refractive index was observed to increase with both power density and the degree of fragmentation in the plasma. Film composition was measured by elementary analysis, and was found to be almost identical for each of the three isomers; a mechanism for the polymerization reaction is proposed. The percentage of primary amino groups decreased with increasing power density and with film thickness. Surface force measurements of the thickness and refractive index agreed well with the corresponding ellipsometry values in dry air, and an adhesive force, independent of power density, was measured. When the film was exposed to water vapor, it swelled considerably and the adhesion was determined by capillary forces. Associated with swelling, at high power, was an extremely regular 2-ply rope pattern of protruding material.