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Step response of vacuum sensors: A preliminary study
RISE., SP – Sveriges Tekniska Forskningsinstitut, SP Mätteknik, Massa, kraft, längd och tryck.ORCID-id: 0000-0001-9309-9262
2012 (engelsk)Inngår i: 20th IMEKO World Congress 2012, 2012, Vol. 3, s. 1816-1818s. 1816-1818Konferansepaper, Publicerat paper (Fagfellevurdert)
Abstract [en]

The development of a system for determining step response of total vacuum gauges is described as well as results for some typical vacuum gauges. The system is mainly suitable for steps from atmospheric pressure down to around 50 Pa. Step response times reached with the system are (with reasonable sizes of DUT internal volumes) about 20ms.

sted, utgiver, år, opplag, sider
2012. Vol. 3, s. 1816-1818s. 1816-1818
Emneord [en]
Dynamic pressure, Step response, Vacuum gauge
HSV kategori
Identifikatorer
URN: urn:nbn:se:ri:diva-12547Scopus ID: 2-s2.0-84880445803Lokal ID: 23995OAI: oai:DiVA.org:ri-12547DiVA, id: diva2:970371
Konferanse
20th IMEKO World Congress 2012; Busan; South Korea; 9-14 Sept., 2012
Tilgjengelig fra: 2016-09-13 Laget: 2016-09-13 Sist oppdatert: 2024-03-25bibliografisk kontrollert

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Arrhén, Fredrik

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