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3D SEM for surface topography quantification - A case study on dental surfaces
Halmstad University, Sweden; ENISE, France.
RISE, SP – Sveriges Tekniska Forskningsinstitut, SP Mätteknik, Massa, kraft, längd och tryck.ORCID iD: 0000-0001-7501-8318
Halmstad University, Sweden.
Halmstad University, Sweden.
2014 (English)In: 14th International Conference on Metrology and Properties of Engineering Surfaces, Met and Props 2013, 2014, Vol. 483, p. 12026article id 012026Conference paper, Published paper (Other academic)
Abstract [en]

3D analysis of surface topography is becoming a more used tool for industry and research. New ISO standards are being launched to assist in quantifying engineering surfaces. The traditional optical measuring instrumentation used for 3D surface characterization has been optical interferometers and confocal based instrumentation. However, the resolution here is limited in the lateral dimension to the wavelength of visible light to about 500 nm. The great advantage using the SEM for topography measurements is the high flexibility to zoom from low magnifications and locating interesting areas to high magnification of down to nanometer large surface features within seconds. This paper presents surface characterization of dental implant micro topography. 3D topography data was created from SEM images using commercial photogrammetric software. A coherence scanning interferometer was used for reference measurements to compare with the 3D SEM measurements on relocated areas. As a result of this study, measurements emphasizes that the correlation between the accepted CSI measurements and the new technology represented by photogrammetry based on SEM images for many areal characterization parameters are around or less than 20%. The importance of selecting sampling and parameter sensitivity to varying sampling is high-lighted. Future work includes a broader study of limitations of the photogrammetry technique on certified micro-geometries and more application surfaces at different scales.

Place, publisher, year, edition, pages
2014. Vol. 483, p. 12026article id 012026
Series
Journal of Physics: Conference Series, ISSN 1742-6588
National Category
Natural Sciences
Identifiers
URN: urn:nbn:se:ri:diva-12474DOI: 10.1088/1742-6596/483/1/012026Scopus ID: 2-s2.0-84898937910Local ID: 23755OAI: oai:DiVA.org:ri-12474DiVA, id: diva2:970298
Conference
Journal of Physics : Conference Series (14th International Conference on Metrology and Properties of Engineering Surfaces, Met and Props 2013; Taipei; Taiwan; Jun. 17 through Jun. 21, 2013)
Available from: 2016-09-13 Created: 2016-09-13 Last updated: 2021-05-04Bibliographically approved

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Flys, Olena

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