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An Invar-based dual Fabry-Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region
Umeå University, Sweden.
RISE Research Institutes of Sweden, Säkerhet och transport, Mätteknik. Umeå University, Sweden.ORCID-id: 0000-0002-3261-9903
RISE Research Institutes of Sweden, Säkerhet och transport, Mätteknik.ORCID-id: 0000-0001-9068-6031
Umeå University, Sweden.
2023 (Engelska)Ingår i: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 41, nr 6, artikel-id 064206Artikel i tidskrift (Refereegranskat) Published
Abstract [en]

An updated version of an Invar-based dual Fabry-Perot cavity refractometer utilizing the gas modulation methodology has been characterized with regard to its ability to assess gas pressure in the low pressure regime, defined as the regime in which the instrumentation is mainly limited by the constant term a in the [ ( a ) 2 + ( b × P ) 2 ] 1 / 2 expression for the uncertainty. It is first concluded that this ability is predominantly limited by three entities, viz., the empty cavity repeatability, the residual gas pressures in the evacuated (measurement) cavity, and the contamination of the gas residing in the measurement cavity that originates from leaks and outgassing. We then present and utilize methods to separately estimate the uncertainty of the updated refractometer from these entities. It was found that, when utilizing gas modulation cycles of 100 s and when addressing nitrogen, the system can assess pressure in the low pressure regime with an expanded uncertainty ( k = 2 ) of 0.75 mPa, mainly limited by the empty cavity repeatability and outgassing of hydrogen. This is more than 1 order of magnitude below the previously assessed low pressure performance of the instrumentation.

Ort, förlag, år, upplaga, sidor
AVS Science and Technology Society , 2023. Vol. 41, nr 6, artikel-id 064206
Nyckelord [en]
Fabry-Perot interferometers; Fiber optic sensors; Refractometers; Uncertainty analysis; Fabry-Perot cavity; Gas pressures; Low pressures; Modulation cycles; Orders of magnitude; Performance; Pressure regime; Residual gas pressure; Uncertainty; Gases
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URN: urn:nbn:se:ri:diva-69281DOI: 10.1116/6.0003149Scopus ID: 2-s2.0-85180985439OAI: oai:DiVA.org:ri-69281DiVA, id: diva2:1826252
Anmärkning

This work has received funding from the European Partnership on Metrology (MQB-Pascal, 22IEM04) and co-financed from the European Union’s Horizon Europe Research and Innovation Programme and by the Participating States. It has also been supported by Vetenskapsrådet (VR) (2020-05105) and the Vinnova Metrology Programme (2018-04570).

Tillgänglig från: 2024-01-11 Skapad: 2024-01-11 Senast uppdaterad: 2024-05-27Bibliografiskt granskad

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Zakrisson, JohanZelan, Martin

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