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An Invar-based dual Fabry-Perot cavity refractometer for assessment of pressure with a pressure independent uncertainty in the sub-mPa region
Umeå University, Sweden.
RISE Research Institutes of Sweden. Umeå University, Sweden.
RISE Research Institutes of Sweden, Safety and Transport, Measurement Technology.ORCID iD: 0000-0001-9068-6031
Umeå University, Sweden.
2023 (English)In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, ISSN 2166-2746, E-ISSN 2166-2754, Vol. 41, no 6, article id 064206Article in journal (Refereed) Published
Abstract [en]

An updated version of an Invar-based dual Fabry-Perot cavity refractometer utilizing the gas modulation methodology has been characterized with regard to its ability to assess gas pressure in the low pressure regime, defined as the regime in which the instrumentation is mainly limited by the constant term a in the [ ( a ) 2 + ( b × P ) 2 ] 1 / 2 expression for the uncertainty. It is first concluded that this ability is predominantly limited by three entities, viz., the empty cavity repeatability, the residual gas pressures in the evacuated (measurement) cavity, and the contamination of the gas residing in the measurement cavity that originates from leaks and outgassing. We then present and utilize methods to separately estimate the uncertainty of the updated refractometer from these entities. It was found that, when utilizing gas modulation cycles of 100 s and when addressing nitrogen, the system can assess pressure in the low pressure regime with an expanded uncertainty ( k = 2 ) of 0.75 mPa, mainly limited by the empty cavity repeatability and outgassing of hydrogen. This is more than 1 order of magnitude below the previously assessed low pressure performance of the instrumentation.

Place, publisher, year, edition, pages
AVS Science and Technology Society , 2023. Vol. 41, no 6, article id 064206
Keywords [en]
Fabry-Perot interferometers; Fiber optic sensors; Refractometers; Uncertainty analysis; Fabry-Perot cavity; Gas pressures; Low pressures; Modulation cycles; Orders of magnitude; Performance; Pressure regime; Residual gas pressure; Uncertainty; Gases
National Category
Mechanical Engineering
Identifiers
URN: urn:nbn:se:ri:diva-69281DOI: 10.1116/6.0003149Scopus ID: 2-s2.0-85180985439OAI: oai:DiVA.org:ri-69281DiVA, id: diva2:1826252
Note

This work has received funding from the European Partnership on Metrology (MQB-Pascal, 22IEM04) and co-financed from the European Union’s Horizon Europe Research and Innovation Programme and by the Participating States. It has also been supported by Vetenskapsrådet (VR) (2020-05105) and the Vinnova Metrology Programme (2018-04570).

Available from: 2024-01-11 Created: 2024-01-11 Last updated: 2024-01-11Bibliographically approved

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Zelan, Martin

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