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Effects of deposition temperature on the mechanical and structural properties of amorphous Al-Si-O thin films prepared by radio frequency magnetron sputtering
RISE Research Institutes of Sweden, Bioeconomy and Health, Material and Surface Design.ORCID iD: 0000-0003-2160-6979
Linköping University, Sweden.ORCID iD: 0000-0003-1785-0864
Uppsala University, Sweden.ORCID iD: 0000-0003-0296-5247
Linköping University, Sweden.ORCID iD: 0000-0002-8469-5983
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2023 (English)In: Thin Solid Films, ISSN 0040-6090, E-ISSN 1879-2731, Vol. 787, article id 140135Article in journal (Refereed) Published
Abstract [en]

Aluminosilicate (Al–Si–O) thin films containing up to 31 at.% Al and 23 at.% Si were prepared by reactive RF magnetron co-sputtering. Mechanical and structural properties were measured by indentation and specular reflectance infrared spectroscopy at varying Si sputtering target power and substrate temperature in the range 100 to 500 °C. It was found that an increased substrate temperature and Al/Si ratio give denser structure and consequently higher hardness (7.4 to 9.5 GPa) and higher reduced elastic modulus (85 to 93 GPa) while at the same time lower crack resistance (2.6 to 0.9 N). The intensity of the infrared Si-O-Si/Al asymmetric stretching vibrations shows a linear dependence with respect to Al concentration. The Al–O–Al vibrational band (at 1050 cm−1) shifts towards higher wavenumbers with increasing Al concentration which indicates a decrease of the bond length, evidencing denser structure and higher residual stress, which is supported by the increased hardness. The same Al–O–Al vibrational band (at 1050 cm−1) shifts towards lower wavenumber with increasing substrate temperature indicating an increase in the average coordination number of Al.

Place, publisher, year, edition, pages
2023. Vol. 787, article id 140135
Keywords [en]
Aluminosilicate, Thin films, Magnetron sputtering, Nanoindentation, Hardness, Crack resistance, Infrared spectroscopy
National Category
Materials Engineering Nano Technology Condensed Matter Physics Inorganic Chemistry
Identifiers
URN: urn:nbn:se:ri:diva-68138DOI: 10.1016/j.tsf.2023.140135OAI: oai:DiVA.org:ri-68138DiVA, id: diva2:1816463
Projects
Energi- och resurseffektiva produktionsprocesser för hållbara ytbeläggningsmaterialTunnare och starkare glas för hållbar produktion och konsumtion
Funder
The Crafoord Foundation, 2022-0692Swedish Energy Agency, 52740-1Swedish Research Council Formas, 2018-00707
Note

SK and PE acknowledge financial support by the Swedish Energy Agency (grant no. 52740-1). SK acknowledge financial support by FORMAS, the Swedish Research Council for Sustainable Development (grant no. 2018-00707). SA acknowledge the financial support from the KKL Advanced Materials, LNU (grant no. 87202002) and Crafoord Foundation (grant no. 2022-0692).

Available from: 2023-12-01 Created: 2023-12-01 Last updated: 2023-12-05Bibliographically approved

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Karlsson, Stefan

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