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Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams
RISE, Swedish ICT, Acreo.ORCID iD: 0000-0003-1793-4451
RISE, Swedish ICT, Acreo.
RISE, Swedish ICT, Acreo.ORCID iD: 0000-0002-0459-1157
2016 (English)In: Journal of Physics, Conference Series, ISSN 1742-6588, E-ISSN 1742-6596, Vol. 773, no 1, article id 012080Article in journal (Refereed) Published
Abstract [en]

During the manufacturing of MEMS components, slanted beams can be produced in the etching process. We show that this can be used to produce skew motion that causes deflection of a proof mass out of the device plane also when the excitation is confined to the device plane. This allows construction of an energy harvester that uses a planar manufacturing process and produces power also with in-plane excitation. To obtain this with traditional methods it would be necessary to manufacture separate components and then mount them with their sensitive axes orthogonal to each other.

Place, publisher, year, edition, pages
2016. Vol. 773, no 1, article id 012080
Keywords [en]
Energy conversion, Manufacture, Nanotechnology, Energy Harvester, Etching process, Manufacturing process, Multi-Axis, Piezoelectric energy harvesting, Proof mass, Slanted beams, Energy harvesting
National Category
Computer and Information Sciences
Identifiers
URN: urn:nbn:se:ri:diva-32557DOI: 10.1088/1742-6596/773/1/012080Scopus ID: 2-s2.0-85009820189OAI: oai:DiVA.org:ri-32557DiVA, id: diva2:1155619
Conference
16th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS 2016), December 6-9, 2016, Paris, France
Available from: 2017-11-08 Created: 2017-11-08 Last updated: 2019-06-27Bibliographically approved

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Johannisson, PontusRusu, Cristina

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