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Self-aligned 0-level sealing of MEMS devices by a two layer thin film reflow process
RISE, Swedish ICT, Acreo.
2004 (English)In: Microsystem Technologies: Micro- and Nanosystems Information Storage and Processing Systems, ISSN 0946-7076, E-ISSN 1432-1858, Vol. 10, no 5, p. 364-71Article in journal (Refereed) Published
Place, publisher, year, edition, pages
2004. Vol. 10, no 5, p. 364-71
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Computer and Information Sciences
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URN: urn:nbn:se:ri:diva-31981OAI: oai:DiVA.org:ri-31981DiVA, id: diva2:1151839
Available from: 2017-10-24 Created: 2017-10-24 Last updated: 2020-12-01Bibliographically approved

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