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A novel 3-axis monolithic silicon accelerometer
RISE., Swedish ICT, Acreo, Sensor Systems.
1995 (Engelska)Ingår i: Digest of Techn. Papers, The 8th Int. Conf. on Solid-State Sensors and Actuators, Transducers ‘95/ Eurosensors IX), Volume II, pp. 558-561., 1995Konferensbidrag, Publicerat paper (Refereegranskat)
Abstract [en]

Working prototypes of a novel 3 axis monolithic silicon accelerometer have been manufactured at Chalmers University of Technology in co operation with Saab Combitech AB and the Department of Solid State Electronics. Experience from the prototypes is most encouraging as they have confirmed the theoretical predictions of negligible cross-axis sensitivity. The accuracy in the separation of an arbitrary directed acceleration into acceleration vectors in a Cartesian system of coordinates has shown to be high almost beyond expectation. The accelerometer has good potential to develop into a low cost 3 axis accelerometer in the 0 2 g range with a resolution of about 10 mg. This in part due to the simple manufacturing process.

Ort, förlag, år, upplaga, sidor
1995.
Nyckelord [en]
MEMS, 3-axis, Accelerometer, Quad-Slanted Beam
Nationell ämneskategori
Elektroteknik och elektronik
Identifikatorer
URN: urn:nbn:se:ri:diva-25153ISBN: 91-630-3473-5 (tryckt)OAI: oai:DiVA.org:ri-25153DiVA, id: diva2:1132694
Konferens
Stockholm, Sweden, Sunday, June 25, 1995
Projekt
MEMS InertialTillgänglig från: 2018-04-14 Skapad: 2016-10-31 Senast uppdaterad: 2018-04-14Bibliografiskt granskad

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