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Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding,
Sanz-Velasco, A
Rödjegård, H
RISE, Swedish ICT, SICS, Imego.
Andersson, Gert
RISE, Swedish ICT, SICS, Imego.
ORCID iD:
0000-0001-6637-9859
2002 (English)
In:
Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002), 2002
Conference paper (Refereed)
Place, publisher, year, edition, pages
2002.
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
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URN:
urn:nbn:se:ri:diva-25201
DOI:
10.1117/12.462867
OAI: oai:DiVA.org:ri-25201
DiVA, id:
diva2:1132646
Available from:
2018-07-02
Created:
2016-10-31
Last updated:
2020-12-01
Bibliographically approved
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modern-language-association-8th-edition
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