Ändra sökning
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf
Stress-minimized packaging of inertial sensors using wire bonding
KTH Royal Institute of Technology, Sweden.
RISE., Swedish ICT, Acreo.
RISE., Swedish ICT, Acreo.
Sensonor AS, Norway.
Visa övriga samt affilieringar
2013 (Engelska)Ingår i: 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 2013, s. 1962-1965, artikel-id 6627179Konferensbidrag, Publicerat paper (Refereegranskat)
Abstract [en]

This paper presents a packaging approach for inertial sensors using wire bonding technology. The die is mounted exclusively by bond wires on the front- and backside to the package. Conventional single-side die attach to substrates, such as gluing, is abandoned. The approach is characterized by its novel and symmetric die attach concept as well as its simplicity of applying a standard wire bonding process. The wire bond attachment facilitates significant reduction of thermally induced mechanical stresses. The attachment concept is characterized in terms of attachment stiffness and potential die resonances using Laser Doppler Vibrometry (LDV). White-light interferometry is used to investigate stress related warping that is induced by the die attachment process.

Ort, förlag, år, upplaga, sidor
2013. s. 1962-1965, artikel-id 6627179
Nyckelord [en]
die attach, inertial sensors, Laser Doppler Vibrometry, Low-stress, packaging, white-light interferometry, wire bonding, Die-attach, Inertial sensor, Low stress, Actuators, Electronics packaging, Inertial navigation systems, Interferometry, Laser Doppler velocimeters, Microsystems, Solid-state sensors, Stresses
Nationell ämneskategori
Teknik och teknologier
Identifikatorer
URN: urn:nbn:se:ri:diva-47583DOI: 10.1109/Transducers.2013.6627179Scopus ID: 2-s2.0-84891708939ISBN: 9781467359818 (tryckt)OAI: oai:DiVA.org:ri-47583DiVA, id: diva2:1463458
Konferens
2013 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013, 16 June 2013 through 20 June 2013, Barcelona
Tillgänglig från: 2020-09-02 Skapad: 2020-09-02 Senast uppdaterad: 2020-12-01Bibliografiskt granskad

Open Access i DiVA

Fulltext saknas i DiVA

Övriga länkar

Förlagets fulltextScopus
Av organisationen
Acreo
Teknik och teknologier

Sök vidare utanför DiVA

GoogleGoogle Scholar

doi
isbn
urn-nbn

Altmetricpoäng

doi
isbn
urn-nbn
Totalt: 16 träffar
RefereraExporteraLänk till posten
Permanent länk

Direktlänk
Referera
Referensformat
  • apa
  • ieee
  • modern-language-association-8th-edition
  • vancouver
  • Annat format
Fler format
Språk
  • de-DE
  • en-GB
  • en-US
  • fi-FI
  • nn-NO
  • nn-NB
  • sv-SE
  • Annat språk
Fler språk
Utmatningsformat
  • html
  • text
  • asciidoc
  • rtf