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Sanz-Velasco, A., Rödjegård, H. & Andersson, G. (2002). Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding,. In: Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002): .
Open this publication in new window or tab >>Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding,
2002 (English)In: Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002), 2002Conference paper (Refereed)
National Category
Electrical Engineering, Electronic Engineering, Information Engineering
Identifiers
urn:nbn:se:ri:diva-25201 (URN)10.1117/12.462867 (DOI)
Available from: 2018-07-02 Created: 2016-10-31 Last updated: 2018-07-19Bibliographically approved
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ORCID iD: ORCID iD iconorcid.org/0000-0001-6637-9859

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